JPS6420733U - - Google Patents
Info
- Publication number
- JPS6420733U JPS6420733U JP11600387U JP11600387U JPS6420733U JP S6420733 U JPS6420733 U JP S6420733U JP 11600387 U JP11600387 U JP 11600387U JP 11600387 U JP11600387 U JP 11600387U JP S6420733 U JPS6420733 U JP S6420733U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- round
- pair
- support
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Advancing Webs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11600387U JPS6420733U (en]) | 1987-07-28 | 1987-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11600387U JPS6420733U (en]) | 1987-07-28 | 1987-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6420733U true JPS6420733U (en]) | 1989-02-01 |
Family
ID=31358164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11600387U Pending JPS6420733U (en]) | 1987-07-28 | 1987-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6420733U (en]) |
-
1987
- 1987-07-28 JP JP11600387U patent/JPS6420733U/ja active Pending